MEDIDORES E CONTROLADORES DE VAZÃO DE MÁSSICO TERMAL

O que é vazão mássica térmica?

A vazão mássica térmica se refere à quantidade de massa de um gás que passa por um determinado ponto em um determinado período. Em processos industriais, o controle preciso dessa vazão é crucial para garantir a qualidade do produto final, a eficiência do processo e a segurança da operação.

Como funciona um medidor de vazão mássica térmica?

diagrama de um medidor de vazão mássica térmica

O medidor de vazão mássica térmica utiliza o princípio da transferência de calor para medir a vazão de gás. Ele possui dois sensores de temperatura e um elemento de aquecimento. O gás flui sobre o elemento de aquecimento e absorve parte do calor. A diferença de temperatura entre os dois sensores é proporcional à vazão mássica do gás.

Medidores Controlador de vazão mássica térmica

Medidor: Mede a vazão mássica do gás.
Controlador: Mede a vazão e a ajusta automaticamente para manter o valor desejado.

Benefícios de usar medidores de vazão mássica térmica:
Alta precisão e repetibilidade
Não são afetados por mudanças de temperatura e pressão
Ampla gama de aplicações
Fácil instalação e manutenção

Aplicações:
Indústria química e petroquímica
Geração de energia
Farmacêutica
Alimentos e bebidas

PRODUTOS DE VAZÃO MASSICO TERMAL

Product Type

Mass Flow Meter

Mass Flow Controller

Mass Flow Controller

Mass Flow Controller

Mass Flow Controller

Mass Flow Controller

Differentiator

Wide Flow & Pressure Range

Superior Long-term Stability

High Accuracy

High Accuracy

MultiFlo™ Capability

Compact Size

Suitable for Full Suite of Gases

Proven Reliable Performance

Long Term Stability

Easy to Change Range and Recalibrate in the Field

IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

Ultra-fast Response Times

Optional Local Operator Interface

Compact Size

Suitable for Non-corrosive Gases

Economical

Compact

Ideal Upgrade from Volumetric Devices

Flow Range (Full Scale Capacity)

.003 – 2500 slpm

3 sccm – 50 slpm

0 – 1000 slpm

.003 – 2500 slpm

50 sccm – 40 slpm

0  – 50 slpm

Seal Material

Elastomer Seal

Elastomer Seal

Elastomer Seal

Elastomer Seal

Elastomer Seal

Stainless Steel

Max Pressure

.003-200 slpm: 1500 psi/103 bar

100 – 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

150 psig/10 bar

Controllers: 1500 psig

Meters: up to 4500 psig on some models

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm:  1000 psi/70 bar

150 psig/10 barg

150 psig

Accuracy

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20-100% FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS

Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20-100% FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

1% of SP 35-100%, 0.35% of FS 2-35%

1% of FS

1.5% of FS > 20 slpm

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20-100% FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS

Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20-100% FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

3.0% of FS

1.0% of FS (optional)

5% of FS including linearity

Repeatability

0.20% SP

0.20% SP

0.25% of Rate

0.20% SP

0.15% FS

0.50% FS

Multi-Gas & Range Configurability

Standard

MultiFlo™ Available

Standard

Diagnostic Capability

Available

Available

Available

Available

Analog Communication

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

0-5 V, 0-10 V
0-20 mA, 4-20 mA

0-5 Vdc

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

0-5 Vdc
4-20 mA

0-5 V into 1000 ohms or greater

Digital Communication

DeviceNet™
EtherCAT®
EtherNet/IP™
Profibus®
PROFINET
RS-485 

DeviceNetTM
EtherCAT®
Profibus®
RS485

DeviceNet™
EtherNet/IP™
Profibus®
PROFINET
RS-485 

RS232

Size

Medium

Compact

Large

Compact

Compact

Certifications/Approval

ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU

UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

KOSHA: Ex nA IIC T4

CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Safety EN61010-1

ISO/IEC 17025:2005

CE: EMC, RoHs, PED

UL Listed/Recognized:

Class 1, Div 2, Group A,B,C,D
Class 1, Zone 2, IIC T4, Class II, Zone 22

ATEX:

II 3 G Ex nA IIC T4 Gc 

II 3 D Ex tc IIIC T 85°C Dc

IECEx:

Ex nA IIC T4 Gc 
Ex tc IIIC T 85°C Dc 

KOSHA:

Ex nA IIC T4
Ex tc IIIC T85°C Dc

ATEX Zone 2

CSA Div 2/Zone 2 (Recognized)

SLA Series

SLA Series

Product Type

Mass Flow Meter

Differentiator

Wide Flow & Pressure Range

Superior Long-term Stability

High Accuracy

Flow Range (Full Scale Capacity)

.003 – 2500 slpm

Seal Material

Elastomer Seal

Max Pressure

.003-200 slpm: 1500 psi/103 bar

100 – 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

Accuracy

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20-100% FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS

Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20-100% FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

Repeatability

0.20% SP

Multi-Gas & Range Configurability

Standard

Diagnostic Capability

Available

Analog Communication

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

Digital Communication

DeviceNet™
EtherCAT®
EtherNet/IP™
Profibus®
PROFINET
RS-485 

Size

Medium

Certifications/Approval

ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU

UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

KOSHA: Ex nA IIC T4

GF40 Series

Product Type

Mass Flow Controller

Differentiator

High Accuracy

MultiFlo™ Capability

Compact Size

Suitable for Full Suite of Gases

Flow Range (Full Scale Capacity)

3 sccm – 50 slpm

Seal Material

Elastomer Seal

Max Pressure

150 psig/10 bar

Accuracy

1% of SP 35-100%, 0.35% of FS 2-35%

Repeatability

0.20% SP

Multi-Gas & Range Configurability

MultiFlo™ Available

Diagnostic Capability

Available

Analog Communication

0-5 V, 0-10 V
0-20 mA, 4-20 mA

Digital Communication

DeviceNetTM
EtherCAT®
Profibus®
RS485

Size

Compact

Certifications/Approval

CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Safety EN61010-1

5850E Series

5850E Series

Product Type

Mass Flow Controller

Differentiator

Proven Reliable Performance

Long Term Stability

Easy to Change Range and Recalibrate in the Field

Flow Range (Full Scale Capacity)

0 – 1000 slpm

Seal Material

Elastomer Seal

Max Pressure

Controllers: 1500 psig

Meters: up to 4500 psig on some models

Accuracy

1% of FS

1.5% of FS > 20 slpm

Repeatability

0.25% of Rate

Multi-Gas & Range Configurability

Diagnostic Capability

Analog Communication

0-5 Vdc

Digital Communication

Size

Certifications/Approval

SLAMf Series

SLAMf Series

Product Type

Mass Flow Controller

Differentiator

IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

Flow Range (Full Scale Capacity)

.003 – 2500 slpm

Seal Material

Elastomer Seal

Max Pressure

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm:  1000 psi/70 bar

Accuracy

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20-100% FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS

Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20-100% FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

Repeatability

0.20% SP

Multi-Gas & Range Configurability

Standard

Diagnostic Capability

Available

Analog Communication

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

Digital Communication

DeviceNet™
EtherNet/IP™
Profibus®
PROFINET
RS-485 

Size

Large

Certifications/Approval

ISO/IEC 17025:2005

CE: EMC, RoHs, PED

UL Listed/Recognized:

Class 1, Div 2, Group A,B,C,D
Class 1, Zone 2, IIC T4, Class II, Zone 22

ATEX:

II 3 G Ex nA IIC T4 Gc 

II 3 D Ex tc IIIC T 85°C Dc

IECEx:

Ex nA IIC T4 Gc 
Ex tc IIIC T 85°C Dc 

KOSHA:

Ex nA IIC T4
Ex tc IIIC T85°C Dc

4800 Series

4800 Series

Product Type

Mass Flow Controller

Differentiator

Ultra-fast Response Times

Optional Local Operator Interface

Compact Size

Suitable for Non-corrosive Gases

Flow Range (Full Scale Capacity)

50 sccm – 40 slpm

Seal Material

Elastomer Seal

Max Pressure

150 psig/10 barg

Accuracy

3.0% of FS

1.0% of FS (optional)

Repeatability

0.15% FS

Multi-Gas & Range Configurability

Diagnostic Capability

Available

Analog Communication

0-5 Vdc
4-20 mA

Digital Communication

RS232

Size

Compact

Certifications/Approval

ATEX Zone 2

CSA Div 2/Zone 2 (Recognized)

5700 Series

5700 Series

Product Type

Mass Flow Controller

Differentiator

Economical

Compact

Ideal Upgrade from Volumetric Devices

Flow Range (Full Scale Capacity)

0  – 50 slpm

Seal Material

Stainless Steel

Max Pressure

150 psig

Accuracy

5% of FS including linearity

Repeatability

0.50% FS

Multi-Gas & Range Configurability

Diagnostic Capability

Analog Communication

0-5 V into 1000 ohms or greater

Digital Communication

Size

Compact

Certifications/Approval